Plasma treatment system CD 300 PLC
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Le vendeur
Belgique, Oudenaarde
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Caractéristiques techniques
- Méthode de pulvérisationPlasma
la description
Process chamber Material : aluminium.
Inside dimensions : 300 x 300 x 300 mm.
Volume : 27 litres.
Door : 1 with viewing glass.
Trays : 3, dimensions : 205 x 260 x 40 mm.
Vacuum measurement Pirani gauge.
RF generator Standard 300 W, kHz.
Pumping system Rotary vane pump 20 m³ per hour.
Process control PLC with colour touch screen.
The PLC :
- runs the process automatically,
- defines different processes as recipes,
- checks pump pressure, pump time, gas flow, working
pressure, process time, temperature, forward power
of RF generator,
- monitors all parameters correctly within preset % of
the machine setting,
- uses an operator, process/maintenance password.
Electricity 380V AC, 3-phase, 50Hz, 40 A.
Process gas 1 gas line with MFC (Mass Flow Controller).
Process gas connection 1/4 "-Swagelok-fitting, input pressure 1 Bar.
Exhaust connection 28 mm diameter.
Safety features Emergency-off-switch, vacuum interlock, over temperature
interlock, CE-label.
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Plasma treatment system CD 300 PLC
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