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Plasma treatment system CD 300 PLC

Plasma treatment system CD 300 PLC

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Belgique, Oudenaarde
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Caractéristiques techniques
  • Méthode de pulvérisationPlasma
la description
Process chamber Material : aluminium. Inside dimensions : 300 x 300 x 300 mm. Volume : 27 litres. Door : 1 with viewing glass. Trays : 3, dimensions : 205 x 260 x 40 mm. Vacuum measurement Pirani gauge. RF generator Standard 300 W, kHz. Pumping system Rotary vane pump 20 m³ per hour. Process control PLC with colour touch screen. The PLC : - runs the process automatically, - defines different processes as recipes, - checks pump pressure, pump time, gas flow, working pressure, process time, temperature, forward power of RF generator, - monitors all parameters correctly within preset % of the machine setting, - uses an operator, process/maintenance password. Electricity 380V AC, 3-phase, 50Hz, 40 A. Process gas 1 gas line with MFC (Mass Flow Controller). Process gas connection 1/4 "-Swagelok-fitting, input pressure 1 Bar. Exhaust connection 28 mm diameter. Safety features Emergency-off-switch, vacuum interlock, over temperature interlock, CE-label.
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Plasma treatment system CD 300 PLC
Plasma treatment system CD 300 PLC
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